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¡m²³¹¤U¸ü¡n

http://www.sme-edu.org.tw/MasterDM/2017/EPE/ICMPA.doc

¡m§ó¦h½Òµ{¡n

http://www.ssi.org.tw

¡m½Òµ{¤jºõ¡n

1.Semiconductor Basics¥b¾ÉÅé °ò¥»·§©À

2.IC / MOS / VLSI / Wafer / Clean Room

3.History of Integrated Circuit IC§Þ³Nµo®i©µ­²

4.Introduction to Semiconductor Equipment and Module Technology

5.Oxidation ®ñ¤Æ/ CVD¤Æ¾Ç®ð¬Û¨I¿n/ PhotoLithography·L¼v³N/Etching »k¨è

6.Ion Implantation Â÷¤l´Ó¤J/ Metalization ª÷ÄÝ¤Æ / CMP¤Æ¾Ç¾÷±ñ¬ã¿i

7.IC Technology Trends IC§Þ³Nµo®iÁͶÕ

8.CMOS Process Flow  CMOS»sµ{¾ã¦X²¤¶

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