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http://www.sme-edu.org.tw/MasterDM/2017/EPE/ICMPA.doc
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http://www.ssi.org.tw
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1.Semiconductor Basics¥b¾ÉÅé °ò¥»·§©À
2.IC / MOS / VLSI / Wafer / Clean Room
3.History of Integrated Circuit IC§Þ³Nµo®i©µ²
4.Introduction to Semiconductor Equipment and Module Technology
5.Oxidation ®ñ¤Æ/ CVD¤Æ¾Ç®ð¬Û¨I¿n/ PhotoLithography·L¼v³N/Etching »k¨è
6.Ion Implantation Â÷¤l´Ó¤J/ Metalization ª÷ÄÝ¤Æ / CMP¤Æ¾Ç¾÷±ñ¬ã¿i
7.IC Technology Trends IC§Þ³Nµo®iÁͶÕ
8.CMOS Process Flow CMOS»sµ{¾ã¦X²¤¶




